In cold and hot stage applications, products related to temperature control technology, in-situ mechanical technology, and others—such as wafer heating systems, rapid annealing furnaces, and high-low temperature test chambers—can be customized to meet specific client requirements.
The GoGo Instruments Wafer Heating Device:It plays a critical role in semiconductor processing, particularly in key steps such as wafer annealing, bonding, photoresist coating, etching, and chemical vapor deposition. It delivers a stable thermal environment and highly uniform temperature distribution across the platen, meeting precise heating requirements across various temperature zones to support both manufacturing and R&D of semiconductor devices.
• Temperature range:RT~600°C
• Temperature stability: ±0.1°C
• Material:Aluminum alloy, stainless steel, Invar®, etc.
• High-Precision Temperature Control
• Professional Temperature Control Software
• Customization available