The equipment enables multi-field coupling tests in optics, electricity, and high/low-temperature control. It is equipped with a custom adapter plate for stable connection to on-site optical systems, effectively suppressing interference from vacuum vibrations on micro-area observation. Additionally, the 9 mm objective lens working distance supports optical observation at 50× magnification.

To expand the equipment's applications, electrical testing can be performed in two scenarios:
(1) Samples integrated with micro-electrodes on a PCB board can be directly connected for testing.
(2) After removing the PCB board, the equipment can function as a standard optical Heating/Cooling stage.

The device comes with electrical interfaces, allowing it to be connected to semiconductor parameter analyzers for leakage current testing as low as fA level. To meet the demands of high-magnification objective observation, the equipment also integrates an independent gas path system. It supports vacuum testing and can be filled with inert gas after pre-vacuum for temperature-controlled experiments, further reducing vibration impact on high-resolution observation.

Equipment Adaptation On-Site

Main Technical Specifications of the Product:

1.Cooling/Heating Method: Liquid nitrogen cooling, resistance heating

2.Temperature Range: -190°C to 600°C (-190°C to 400°C under vacuum)

3.Temperature Stability: -190℃~120℃，±0.3℃；120℃~600℃，±0.1℃

4.Temperature Ramp Rate: Maximum heating rate: 150°C/min; Maximum cooling rate: 40°C/min

5.Sample Stage: Silver; 23mm * 23mm

6.Optical Path: Reflective

7.Top Window Size: Φ25mm * 1mm

8.Window Material: JGS2 Quartz Glass (Transmission wavelength range: 220nm ~ 2500nm, manually detachable and replaceable)

9.Distance from Window Upper Surface to Sample Stage Upper Surface: 9mm

10.Window Defrosting: Gas purge defrosting at low temperatures

11.Electrical Interface: BNC * 6

12.Sample Stage Surface Potential: Grounded / Electrically floating

13.Chamber: Vacuum

14.Electrical Implementation: PCB board