This externally adjustable probe station utilizes the micrometer head structure of external probe modules to achieve XYZ-direction displacement, allowing probes inside the chamber to be adjusted with micron-level movement. The movement modules are designed outside the chamber, ensuring they do not affect the internal environment. Employing liquid nitrogen cooling and resistance heating, it enables precise temperature control within a range of -190℃ to 600℃. It can be integrated with electrical instruments (such as Source Meters, Multimeters, etc.) to perform in-situ temperature-dependent testing.
Key Product Technical Parameters:
Heating/Cooling Method: Liquid Nitrogen Cooling, Resistance Heating
Temperature Control Range: -190℃ ~ 600℃
Temperature Stability: ±0.5℃
Max Heating Rate: 100°C/min @ 100℃ (Supports setpoint/segment program control)
Max Cooling Rate: 100°C/min @ -50℃ (Supports setpoint/segment program control)
Sample Stage Size: Oxygen-Free Copper; 50mm * 50mm
Optical Path: Reflective Light Path
Probes: Adjustable Probes * 12 (Tip: 5μm, Gold-plated)
Probe Interface: Triaxial BNC
Probe Travel Range: X/Y-axis: ±25mm, Z-axis: ±10mm
Probe Displacement Resolution: 5μm
Chamber: Vacuum Chamber
Application Scene of the Custom Externally Adjustable Probe Station from GoGo Instruments: